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As semiconductor device feature sizes shrink and new nanoscale materials are developed, traditional characterization tools used to study local changes within semiconductors and electronic circuits start becoming obsolete. With in situ TEM, you can image systems at atomic resolution to conduct understand working conditions or test the performance of new devices and materials in your lab.

Electronic-Devices-Fusion

Fusion AX: Study high temperature heating, electrical and electrothermal in vacuum

Follow resistive switching processes, charge and discharge nanobatteries while measuring columbic efficiency, and study your materials’ electrical properties at high temperature, all without compromising on resolution.

Click here to learn more about our in situ heating and biasing

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What have our users done in the field? Read our summaries here!

Videos

Watch dynamic behavior of real samples in situ.

Using the Protochips Fusion System in the SEM, we show Schott glass melting at ~620 °C. Its known melting point is 622 °C. This demonstrates the accuracy of the Fusion heating system. For more information on Fusion, visit www.protochips.com/fusion.

Fusion™ In Situ Heating and Electrical Holder: Schott Glass Melting

Using the Protochips Fusion System in the SEM, we show Schott glass melting at ~620 °C. Its known melting point is 622 °C. This demonstrates the accuracy of the Fusion heating system. For more information on Fusion, visit www.protochips.com/fusion.

This video shows gold nanoparticles at 600 C. The video shows the stability of the Protochips Fusion™ at high temperatures and the ability to resolve dynamic events with sub-Angstrom resolution. The initial video was taken at 1 frame per second, and then sped up to 5 frames per second using video editing software later. The video was taken in the TEAM 0.5 microscope (FEI Titan, 300 kV, Cs aberration correction, monochromator) at Berkeley National Laboratory, Berkeley, California.

Au Nanoparticles at Atomic Resolution at 600 C

This video shows gold nanoparticles at 600 C. The video shows the stability of the Protochips Fusion™ at high temperatures and the ability to resolve dynamic events with sub-Angstrom resolution. The initial video was taken at 1 frame per second, and then sped up to 5 frames per second using video editing software later. The video was taken in the TEAM 0.5 microscope (FEI Titan, 300 kV, Cs aberration correction, monochromator) at Berkeley National Laboratory, Berkeley, California.

This workflow explains the procedure for preparing FIB samples onto a MEMS-based E-chip for in situ TEM. FIB sample preparation can be used to prepare a wide variety of materials for TEM or in situ TEM analysis and is a relatively simple technique to learn. For more information, tips and tricks, and sample preparation guides, visit our library of content at www.protochips.com

How to prepare FIB samples for in situ TEM

This workflow explains the procedure for preparing FIB samples onto a MEMS-based E-chip for in situ TEM. FIB sample preparation can be used to prepare a wide variety of materials for TEM or in situ TEM analysis and is a relatively simple technique to learn. For more information, tips and tricks, and sample preparation guides, visit our library of content at www.protochips.com

Fusion™ In Situ Heating and Electrical Holder: Schott Glass Melting

Using the Protochips Fusion System in the SEM, we show Schott glass melting at ~620 °C. Its known melting point is 622 °C. This demonstrates the accuracy of the Fusion heating system. For more information on Fusion, visit www.protochips.com/fusion.

Au Nanoparticles at Atomic Resolution at 600 C

This video shows gold nanoparticles at 600 C. The video shows the stability of the Protochips Fusion™ at high temperatures and the ability to resolve dynamic events with sub-Angstrom resolution. The initial video was taken at 1 frame per second, and then sped up to 5 frames per second using video editing software later. The video was taken in the TEAM 0.5 microscope (FEI Titan, 300 kV, Cs aberration correction, monochromator) at Berkeley National Laboratory, Berkeley, California.

How to prepare FIB samples for in situ TEM

This workflow explains the procedure for preparing FIB samples onto a MEMS-based E-chip for in situ TEM. FIB sample preparation can be used to prepare a wide variety of materials for TEM or in situ TEM analysis and is a relatively simple technique to learn. For more information, tips and tricks, and sample preparation guides, visit our library of content at www.protochips.com

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